Description
High aspect ratio probe for repeatable, accurate depth metrology and imaging on challenging structures such as deep trenches and pits, as encountered on semiconductor samples and optics. Designed for PeakForce Tapping operation on Dimension Icon. 2500nm tall spike with 30nm end radius and 150nm base width. DESCRIPTION
TIP SPECIFICATIONS CANTILEVER SPECIFICATIONS High aspect ratio probe for repeatable, accurate depth metrology and imaging on challenging structures such as deep trenches and pits, as encountered on semiconductor samples and optics. Designed for PeakForce Tapping operation on Dimension Icon. 2500nm tall spike with 30nm end radius and 150nm base width Tip Geometry:
Rotated (Symmetric) Tip Height:
3 – 8 Front Angle:
15+/-2 Back Angle:
25+/-2 Side Angle:
17.5+/-2 Tip Radius (Nom):
30 Tip Coating:
None Tilt Compensation:
12 Cantilever Thickness (Nom):
500 Cantilever Thickness (RNG):
470-530 Cantilever Geometry:
Special Cantilevers Number:
1 Back Side Coating:
Reflective Aluminum
