Description
DESCRIPTION
PRODUCT SPECIFICATIONS See mount selections, types A-R Pelcotec™ CDMS – XY Critical Dimension Magnification Standard Available as NIST Traceable or as Certified against NIST Standard Easy to use and very useful for quick and precise SEM, FESEM, FIB, CD-SEM, LM, and AFM magnification calibration. Scale lines are provided in both X and Y axes for ease of 2 axis calibration without stage rotation. Fully featured and traceable calibration standards for a wide measurement range. They are made using the latest semiconductor and MEMS manufacturing techniques yielding superior line edge quality. The Pelcotec™ CDMS – XY Calibration Standard is available with two features size ranges, which are both offered as traceable and as certified standards, making a total of 4 unmounted versions: Pelcotec™ CDMS-XY-1T; fully traceable with features from 2.0mm to 1um for a magnification range from 10x – 20,000x; ideal for desk top SEMs and low to medium magnification applications Representative CDMS-XY-1T Traceable Certificate (214KB PDF) Pelcotec™ CDMS-XY-0.1T; fully traceable with features from 2.0mm to 100nm for a magnification range up to 10 – 200,000x; for all SEM and most FESEM applications Representative CDMS-XY-0.1T Traceable Certificate (188KB PDF) Pelcotec™ CDMS-XY-1C; individually certified against a NIST standard with features from 2.0mm to 1µm for a magnification range from 10x – 20,000x; ideal for desk top SEMs and low to medium magnification applications Representative CDMS-XY-1C Conformance Certificate (270KB PDF) Pelcotec™ CDMS-XY-0.1C; individually certified against a NIST standard with features from 2.0mm to 100nm for a magnification range up to 10 – 200,000x; for all SEM and most FESEM applications Representative CDMS-XY-0.1C Conformance Certificate (261KB PDF) Comparison Table Below Pelcotec™ CDMS-XY-1
Pelcotec™ CDMS-XY-0.1 Substrate: Silicon
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✓ Substrate size: 2.5 x 2.5mm
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✓ Substrate thickness: 675 ±10µm
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✓ Feature size: 2mm to 1µm
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✓ Feature size: 500, 250 and 100nm
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✓ Feature material: 50nm Cr (2mm – 5µm)
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✓ Feature material: 20nm Cr/50nm Au (2µm and 1µm)
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✓ Feature material: 20nm Cr/50nm Au (500, 250 and 100 nm)
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✓ NIST traceable
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✓ Certification available
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✓ Unmounted
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✓ Mounts A-R available
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✓ Precision better than 0.3%
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✓ Feature sizes for the Pelcotec™ CDMS-XY-1T and -1C are: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm. Feature sizes for the Pelcotec™ CDMS-XY-0.1T & 0.1C are: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm, 500nm, 250nm and 100nm.
